Adachi, Hideaki. , <br/><br/>
Thin Films Material Technology :  Sputtering Of Compound Materials / 
Hideaki Adachi , Makoto Kitabatake , Kiyotaka Wasa. 
 - xiv, 518 pages :  illustrations ;  24 cm. 
<br/><br/><label>ISBN: </label>3642059317 9783642059315 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Cathode sputtering (Planing process).<br/>Thin films.<br/>Surfaces (Technology).
<br/><br/><label>LC Class. No.: </label>TA418.9.T45   / .A32 2004