TY  - BOOK
AU  - Adachi,Hideaki
AU  - Kitabatake,Makoto
AU  - Wasa,Kiyotaka
TI  - Thin Films Material Technology: Sputtering Of Compound Materials 
SN  - 3642059317
AV  - TA418.9.T45  .A32 2004
PY  - 2004///
CY  - Norwich, NY
PB  - Springer, William Andrew Publishing, 
KW  - Cathode sputtering (Planing process)
KW  - Thin films
KW  - Surfaces (Technology)
ER  -