TY  - BOOK
AU  - Smith,Donald L.
TI  - Thin-film deposition: principles and practice 
SN  - 0070585024
AV  - TA418.9.T45  .S64 1995
PY  - 1995///
CY  - Boston
PB  - McGraw-Hill
KW  - Thin films
KW  - Vapor-plating
KW  - Thin film devices
ER  -