Franssila, Sami. , <br/><br/>
Introduction to microfabrication / 
Sami Franssila. 
 - xvii, 401 pages :  illustrations ;  24 cm. 
<br/><br/><label>ISBN: </label>0470851058 0470851066 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Electronic apparatus and appliances.<br/>Microfabrication.
<br/><br/><label>LC Class. No.: </label>TK7875   / .F72 2004