Microsystems technology :  fabrication, test and reliability / 
edited by Jumana Boussey. 
 - vi, 295 pages :  illustrations ;  25 cm. 
<br/><br/><label>ISBN: </label>1903996473 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.
<br/><br/><label>LC Class. No.: </label>TK7875   / .M52 2003