TY  - BOOK
AU  - Boussey,Jumana
TI  - Microsystems technology: fabrication, test and reliability 
SN  - 1903996473
AV  - TK7875  .M52 2003
PY  - 2003///
CY  - London
PB  - Kogan Page Science
KW  - Microelectromechanical systems
ER  -