Enabling technology for MEMS and nanodevices / 
edited by H. Baltes ... [and others]. 
 - xii, 427 pages :  illustrations ;  25 cm. 
 - Advanced micro and nanosystems ;  1 .
<br/><br/><label>ISBN: </label>352730746X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Microelectronics.<br/>Nanotechnology.
<br/><br/><label>LC Class. No.: </label>TK7875   / .E52 2004