TY  - BOOK
AU  - Baltes,H.
TI  - Enabling technology for MEMS and nanodevices
T2  - Advanced micro and nanosystems
SN  - 352730746X
AV  - TK7875  .E52 2004
PY  - 2004///
CY  - Weinheim
PB  - John Wiley
KW  - Microelectromechanical systems
KW  - Microelectronics
KW  - Nanotechnology
ER  -