TY  - BOOK
AU  - Hsu,Tai-Ran
TI  - Mems packaging
T2  - EMIS processing series
SN  - 0863413358
AV  - TK7875  .M46 2004
PY  - 2004///
CY  - London
PB  - Institution of Electrical Engineers
KW  - Microelectromechanical systems
KW  - Microelectronic packaging
ER  -