Lyshevski, Sergey Edward. , <br/><br/>
Nano and micro-electromechanical systems :  fundamentals of nano- and microengineering / 
Sergey Edward Lyshevski. 
 - 2nd ed. 
 - 722 pages :  illustrations ;  26 cm. 
 - Nano- and microscience, engineering, technology and medicine series .
<br/><br/><label>ISBN: </label>0849328381 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.<br/>Nanotechnology.
<br/><br/><label>LC Class. No.: </label>TK7875   / .L97 2005