TY  - BOOK
AU  - Lyshevski,Sergey Edward
TI  - Nano and micro-electromechanical systems: fundamentals of nano- and microengineering 
T2  - Nano- and microscience, engineering, technology and medicine series
SN  - 0849328381
AV  - TK7875  .L97 2005
PY  - 2005///
CY  - Boca Raton
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Nanotechnology
ER  -