Electron beam testing technology / 
edited by John T. L. Thong. 
 - xvi, 462 pages :  illustrations ;  25 cm. 
 - Microdevices .
<br/><br/><label>ISBN: </label>0306443600 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors --Testing.<br/>Electron beams --Industrial applications.<br/>Scanning electron microscopes.
<br/><br/><label>LC Class. No.: </label>TK7871.85   / .E53 1993