TY  - BOOK
AU  - Thong,John T.L.
TI  - Electron beam testing technology
T2  - Microdevices
SN  - 0306443600
AV  - TK7871.85  .E53 1993
PY  - 1993///
CY  - New York
PB  - Plenum Press
KW  - Semiconductors
KW  - Testing
KW  - Electron beams
KW  - Industrial applications
KW  - Scanning electron microscopes
ER  -