CMOS-MEMS / 
volume editors, Oliver Brand and G.K.Fedder. 
 - xiv, 596 pages :  illustrations ;  25 cm. 
 - Advanced micro and nanosystems ;  v.2 .
<br/><br/><label>ISBN: </label>3527310800 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems --Design and construction.<br/>Metal oxide semiconductors, complementary --Design and construction.
<br/><br/><label>LC Class. No.: </label>TK7875   / .C56 2005