Hitchon, W. Nicholas G. , <br/><br/>
Plasma processes for semiconductor fabrication / 
W. N. G. Hitchon. 
 - ix, 221 pages :  illustrations ;  26 cm. 
 - Cambridge studies in semiconductor physics and microelectronic engineering ;  8 .
<br/><br/><label>ISBN: </label>0521018005 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors --Etching.<br/>Plasma etching.
<br/><br/><label>LC Class. No.: </label>TK7871.85   / .H57 1999