TY  - BOOK
AU  - Hitchon,W.Nicholas G.
TI  - Plasma processes for semiconductor fabrication
T2  - Cambridge studies in semiconductor physics and microelectronic engineering
SN  - 0521018005
AV  - TK7871.85  .H57 1999
PY  - 1999///
CY  - London
PB  - Cambridge University Press
KW  - Semiconductors
KW  - Etching
KW  - Plasma etching
ER  -