TY  - BOOK
AU  - Banks,Danny
TI  - Microengineering, MEMS and interfacing: a practical guide 
T2  - Mechanical engineering
SN  - 0824723058
AV  - TK7875  .B36 2006
PY  - 2006///
CY  - Boca Raton, FL
PB  - CRC Press
KW  - Microelectromechanical systems
ER  -