Makabe, T.. , <br/><br/>
Plasma electronics :  applications in microelectronic device fabrication / 
T. Makabe, Z. Petrovic. 
 - 339 pages :  illustrations ;  24 cm. 
 - Series in plasma physics .
<br/><br/><label>ISBN: </label>0750309768 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Plasma engineering.
<br/><br/><label>LC Class. No.: </label>TA2020   / .M34 2006