TY  - BOOK
AU  - Makabe,T..
AU  - Petrovic,Z.
TI  - Plasma electronics: applications in microelectronic device fabrication 
T2  - Series in plasma physics
SN  - 0750309768
AV  - TA2020  .M34 2006
PY  - 2006///
CY  - Boca Raton, FL
PB  - Taylor and Francis
KW  - Plasma engineering
ER  -