Nano-lithography / 
edited by Stefan Landis. 
 - xxv, 325 pages :  illustrations ;  24 cm. 
<br/><br/><label>ISBN: </label>9781848212114 1848212119 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Nanolithography.
<br/><br/><label>LC Class. No.: </label>TK7872.M3   / .N36 2011