TY  - BOOK
AU  - Kissinger,Gudrun
AU  - Weiland,Larg H.
ED  - Society of Photo-optical Instrumentation Engineers.
ED  - Scottish Enterprise.
ED  - European Optical Society.
ED  - Institution of Electrical Engineers.
TI  - In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II
T2  - Proceedings of SPIE--the International Society for Optical Engineering
SN  - 0819441074
AV  - TK7874.75  .I6 2001
PY  - 2001///
CY  - Bellingham, WA
PB  - SPIE
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Congresses
KW  - Semiconductors
KW  - Manufacturing processes
KW  - Microelectronics
KW  - Materials
ER  -