Machlin, Eugene S. , <br/><br/>
Materials science in microelectronics I :  the relationships between thin film processing and structure / 
Eugene S. Machlin. 
 - 2nd ed. 
 - 2v. :  illustrations ;  24 cm. 
<br/><br/>v.1. The relationships between thin film processing and structure. -- volume 2. The effects of structure on properties in thin films 
<br/><br/><label>ISBN: </label>008044640X 9780080446400 0080446396 9780080446394 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Thin films.<br/>Microelectronics.
<br/><br/><label>LC Class. No.: </label>TK7871.15.F5   / .M32 2005