TY  - BOOK
AU  - Machlin,Eugene S.
TI  - Materials science in microelectronics I: the relationships between thin film processing and structure 
SN  - 008044640X
AV  - TK7871.15.F5  .M32 2005
PY  - 2005///-2006
CY  - Amsterdam
PB  - Elsevier
KW  - Thin films
KW  - Microelectronics
N1  - v.1. The relationships between thin film processing and structure. -- volume 2. The effects of structure on properties in thin films
ER  -