May, Gary S. , <br/><br/>
Fundamentals of semiconductor manufacturing and process control / 
Gary S. May, Costas J. Spanos. 
 - xviii, 463 pages :  illustrations ;  24 cm. 
<br/><br/><label>ISBN: </label>0471784060 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductors --Design and construction.<br/>Ontegrated circuits --Design and construction.<br/>Process control --Statistical methods.
<br/><br/><label>LC Class. No.: </label>TK7871.85   / .M394 2006