TY  - BOOK
AU  - May,Gary S.
AU  - Spanos,Costas J.
TI  - Fundamentals of semiconductor manufacturing and process control
SN  - 0471784060
AV  - TK7871.85  .M394 2006
PY  - 2006///
CY  - Hoboken, NJ
PB  - John Wiley
KW  - Semiconductors
KW  - Design and construction
KW  - Ontegrated circuits
KW  - Process control
KW  - Statistical methods
ER  -