Jackson, Mark J. , <br/><br/>
Micro and nanomanufacturing / 
Mark J. Jackson. 
 - x, 699 pages :  illustrations ;  24 cm. 
<br/><br/><label>ISBN: </label>0387258744 9780387258744 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microfabrication.<br/>Nanotechnology.
<br/><br/><label>LC Class. No.: </label>TK7836   / .J32 2007