TY  - BOOK
AU  - Jackson,Mark J.
TI  - Micro and nanomanufacturing
SN  - 0387258744
AV  - TK7836  .J32 2007
PY  - 2007///
CY  - New York
PB  - Springer
KW  - Microfabrication
KW  - Nanotechnology
ER  -