TY  - BOOK
AU  - Gilleo,Ken
TI  - MEMS/MOEMS packaging: concepts, designs, materials and processes 
T2  - McGraw-Hill nanoscience and technology series
SN  - 0071455566
AV  - TK7870.15  .G55 2005
PY  - 2005///
CY  - New York
PB  - McGraw-Hill
KW  - Microelectronic packaging
KW  - Microelectromechanical systems
ER  -