Ballas, R. G.. ,
Piezoelectric multilayer beam bending actuators : static and dynamic behaviour and sensor integration /
R. G. Ballas.
- xiv, 358 pages : illustrations ; 24 cm.
- Microtechnology and MEMS .
9783540326410 3540326413
Piezoelectric devices.
TK7872.P54 / .B34 2007