Into the nano era :  Moore's law beyond planar silicon CMOS / 
Howard R. Huff, editor. 
 - xxviii, 343 pages :  illustrations ;  24 cm. 
 - Springer series in materials science ;  106 .
<br/><br/><label>ISBN: </label>9783540745587 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Integrated circuits --History.<br/>Silicon --Electric properties.<br/>Semiconductors --Materials.
<br/><br/><label>LC Class. No.: </label>TK7871.85   / .I58 2009