TY  - BOOK
AU  - Cavallini,A.
ED  - International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" 
TI  - Gettering and defect engineering in semiconductor technology XII: GADEST 2007 : Proceedings of the 12th International Autumn Meeting EMFCSC, Erice, Italy : October 14-19, 2007 
SN  - 9783908451433
AV  - TK7871.85  .G47 2008
PY  - 2008///
CY  - Zurich
PB  - Trans Tech
KW  - Semiconductors
KW  - Congresses
KW  - Getters
KW  - Silicon crystals
KW  - Defects
KW  - Electrical engineering
KW  - Materials
ER  -