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	1.	MEMS and microsystems : design and manufacture / Tai-Ran Hsu. by Hsu, Tai-Ran [author] Material type: Text; Format: print Publisher: Boston : McGraw-Hill, 2002 Availability: Items available for loan: PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH (2)Call number: TK7874 .H78 2002, ... Place hold Place recall Add to cart (remove)
	2.	MEMS and microsystems : design, manufacture and nanoscale engineering / Tai-Ran Hsu. by Hsu, Tai-Ran [author] Edition: 2nd ed. Material type: Text; Format: print Publisher: Hoboken, NJ : John Wiley, 2008 Availability: Items available for loan: PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH (1)Call number: TK7874 .H78 2008. Place hold Place recall Add to cart (remove)
	3.	Mems packaging / edited by Tai-Ran Hsu. by Hsu, Tai-Ran Series: Material type: Text; Format: print Publisher: London : Institution of Electrical Engineers, 2004 Availability: Items available for loan: PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH (1)Call number: TK7875 .M46 2004. Place hold Place recall Add to cart (remove)

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