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	1.	Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials and MEMS / edited by Kiyotaka Wasa, Isaku Kanno, Hidetoshi Kotera. by Wasa, Kiyotaka Kanno, Isaku Kotera, Hidetoshi Edition: 2nd ed. Material type: Text; Format: print ; Literary form: Not fiction Publisher: Waltham, MA : William Andrew, 2012 Availability: Items available for loan: PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH (1)Call number: TS695 .W36 2012. Place hold Place recall Add to cart (remove)
	2.	Thin Films Material Technology : Sputtering Of Compound Materials / Hideaki Adachi , Makoto Kitabatake , Kiyotaka Wasa. by Adachi, Hideaki [author] Kitabatake, Makoto Wasa, Kiyotaka Material type: Text; Format: print ; Literary form: Not fiction Publisher: Norwich, NY : Springer, William Andrew Publishing, 2004 Availability: Items available for loan: PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH (2)Call number: TA418.9.T45 .A32 2004, ... Place hold Place recall Add to cart (remove)

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