Silicon wafer bonding technology : for VLSI and MEMS applications / edited by Subramanian S. Iyer, Andre J. Auberton-Herve.

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Material type: Text

TextSeries: Publisher: London : Institution of Electrical Engineers, 2002Description: xxv,149p. : illustrations ; 26 cmContent type:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Books - Printed	PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH Main Library General	TK7874.75 .S54 2002 (Browse shelf(Opens below))	Available		1000061978

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