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Fundamental principles of optical lithography : the science of microfabrication / Chris Mack.

By: Material type: TextTextPublisher: Hoboken, NJ : John Wiley, 2007Description: xvii, 515 pages : illustrations ; 25 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 0470018933
  • 9780470018934
Subject(s): LOC classification:
  • TK7874  .M324 2007
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Holdings
Item type Current library Call number Status Date due Barcode
Books - Printed PERPUSTAKAAN GUNASAMA HAB PENDIDIKAN TINGGI PAGOH Main Library General TK7874 .M324 2007 (Browse shelf(Opens below)) Available 1000210755

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