| 000 | 00819cam a22002415a 4500 | ||
|---|---|---|---|
| 001 | u123958 | ||
| 003 | SIRSI | ||
| 005 | 20240619145322.0 | ||
| 008 | 110127s2011 nyu 000 0 eng | ||
| 020 | _a9780387473161 | ||
| 050 | 1 | 4 |
_aTJ163 _b.M45 2011 |
| 245 | 0 | 0 |
_aMems materials and processes handbook / _ceditors, Reza Ghodssi, Pinyen Lin. |
| 260 |
_aNew York : _bSpringer, _c2011. |
||
| 300 |
_axxxv, 1187 p. : _bill. ; _c24 cm. |
||
| 490 | 1 | _aMems refernce shelf | |
| 650 | 0 |
_aMicroelectromechanical systems _xMaterials. |
|
| 650 | 0 | _aMicroelectromechanical systems. | |
| 700 | 1 | _aGhodssi, Reza | |
| 700 | 1 | _aLin, Pinyen | |
| 907 |
_a.b1022483x _b29-08-23 _c05-09-18 |
||
| 998 |
_am _b29-08-23 _cm _da _e- _feng _gnyu _h0 |
||
| 999 |
_c13864 _d13864 |
||