| 000 | 00922cam a2200265 i 4500 | ||
|---|---|---|---|
| 001 | u20996 | ||
| 003 | SIRSI | ||
| 005 | 20240619145526.0 | ||
| 008 | 020130 00 eng | ||
| 020 | _a0824703804 | ||
| 050 |
_aTK7871.85 _b.C66 2001 |
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| 245 | 0 | 0 |
_aContamination-free manufacturing for semiconductors and other precision products / _cedited by Robert P. Donovan. |
| 250 | _a1st ed. | ||
| 264 | 1 |
_aNew York : _bMarcel Dekker, _c2001. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 596 | _a3 | ||
| 650 | 0 |
_aSemiconductors _xDesign and construction. _93882 |
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| 650 | 0 |
_aSemiconductors _xDefects. _93882 |
|
| 700 | 0 |
_aDonovan, R. P. _9115271 |
|
| 907 |
_a.b10280972 _b07-11-22 _c12-09-18 |
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| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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| 999 |
_c19468 _d19468 |
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