| 000 | 01001cam a2200289 i 4500 | ||
|---|---|---|---|
| 001 | u63988 | ||
| 003 | SIRSI | ||
| 005 | 20240619145753.0 | ||
| 008 | 110131 eng | ||
| 020 | _a0849336821 | ||
| 020 | _a9780849336829 | ||
| 050 |
_aTS156.2 _b.O67 2006 |
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| 245 | 0 | 0 |
_aOptical inspection of microsystems / _cedited by Wolfgang Osten. |
| 264 | 1 |
_aBoca Raton, FL : _bTaylor and Francis, _c2006. |
|
| 300 |
_a503 pages : _billustrations ; _c26 cm. |
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| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 596 | _a1 3 | ||
| 650 | 0 |
_aQuality control _xOptical methods. _9171383 |
|
| 650 | 0 |
_aOptical detectors _xIndustrial applications. _9171384 |
|
| 650 | 0 |
_aMicroelectronics. _923274 |
|
| 700 | 1 |
_aOsten, Wolfgang. _9144367 |
|
| 907 |
_a.b10347276 _b07-11-22 _c12-09-18 |
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| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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| 999 |
_c26097 _d26097 |
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