| 000 | 00788cam a2200241 i 4500 | ||
|---|---|---|---|
| 001 | u64334 | ||
| 003 | SIRSI | ||
| 005 | 20240619145754.0 | ||
| 008 | 110131 eng | ||
| 020 | _a3540253777 | ||
| 050 |
_aT147.7 _b.M53 2006 |
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| 245 | 0 | 0 |
_aMicromanufacturing and nanotechnology / _cN. P. Mahalik, editor. |
| 264 | 1 |
_aNew York : _bSpringer, _c2006. |
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| 300 |
_axxiii, 468 pages : _billustrations ; _c25 cm. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 596 | _a1 3 | ||
| 650 | 0 |
_aNanotechnology. _9503 |
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| 907 |
_a.b10348050 _b07-11-22 _c12-09-18 |
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| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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| 999 |
_c26175 _d26175 |
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