000 01030cam a2200301 i 4500
001 u64379
003 SIRSI
005 20240619145755.0
008 110131 eng
020 _a1402032382
050 _aQC688
_b.S26 2005
100 1 _aSantos, Hector De Los. ,
_eauthor
_9171803
245 1 0 _aPrinciples and applications of nanomems physics /
_cHector De Los Santos.
264 1 _aNew York :
_bSpringer,
_c2005.
300 _axv, 254 pages :
_billustrations ;
_c24 cm.
336 _atext
_btxt
_2rdacontent
337 _aunmediated
_bn
_2rdamedia
338 _avolume
_bnc
_2rdacarrier
490 1 _aMicrosystems ;
_v15
596 _a1 3
650 0 _aQuantum electronics.
_926665
650 0 _aWave-particle duality.
_9128880
650 0 _aNanotechnology.
_9503
650 0 _aMicroelectromechanical systems.
_93145
907 _a.b10348153
_b07-11-22
_c12-09-18
998 _am
_b06-11-22
_cm
_da
_e-
_feng
_g
_h0
999 _c26185
_d26185