| 000 | 01040cam a2200289 i 4500 | ||
|---|---|---|---|
| 001 | u66440 | ||
| 003 | SIRSI | ||
| 005 | 20240619145803.0 | ||
| 008 | 110131 eng | ||
| 020 |
_a0819462071 _qpbk. |
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| 050 |
_aTK7874 _b.M32 2006 |
||
| 100 | 1 |
_aMack, Chris A. , _eauthor _9174137 |
|
| 245 | 1 | 0 |
_aField guide to optical lithography / _cChris A. Mack. |
| 264 | 1 |
_aBellingham, WA : _bSPIE, _c2006. |
|
| 300 |
_axii, 122 pages : _billustrations ; _c21 cm. |
||
| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
||
| 338 |
_avolume _bnc _2rdacarrier |
||
| 490 | 1 |
_aSPIE field guides ; _vFG06 |
|
| 596 | _a3 | ||
| 650 | 0 |
_aIntegrated circuits _xDesign and construction. _9170 |
|
| 650 | 0 |
_aMicrolithography. _926813 |
|
| 907 |
_a.b10352120 _b07-11-22 _c12-09-18 |
||
| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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| 999 |
_c26582 _d26582 |
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