000 01008cam a2200301 i 4500
001 u70293
003 SIRSI
005 20240619145942.0
008 110131 eng
020 _a0824759834
050 _aTK7875
_b.M53 2005
245 0 0 _aMicro-optomechatronics /
_cHiroshi Hosaka ... [and others].
264 1 _aNew York :
_bMarcel Dekker,
_c2005.
300 _aviii, 306 pages :
_billustrations ;
_c24 cm.
336 _atext
_btxt
_2rdacontent
337 _aunmediated
_bn
_2rdamedia
338 _avolume
_bnc
_2rdacarrier
490 1 _aOptical engineering ;
_vv. 92
596 _a1 3
650 0 _aMicroelectromechanical systems.
_93145
650 0 _aMechatronics.
_99364
650 0 _aNanotechnology.
_9503
650 0 _aOptoelectronic devices.
_9441
700 1 _aHosaka, Hiroshi.
_9178644
907 _a.b10397590
_b07-11-22
_c27-11-18
998 _am
_b06-11-22
_cm
_da
_e-
_feng
_g
_h0
999 _c31120
_d31120