| 000 | 00934cam a2200265 i 4500 | ||
|---|---|---|---|
| 001 | u72542 | ||
| 003 | SIRSI | ||
| 005 | 20240619145947.0 | ||
| 008 | 110131 eng | ||
| 020 | _a0387233105 | ||
| 050 |
_aTK7875 _b.E53 2005 |
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| 245 | 0 | 0 |
_aElectroceramic-based MEMS : _bfabrication-technology and applications / _cedited by Nava Setter. |
| 264 | 1 |
_aNew York : _bSpringer, _c2005. |
|
| 300 |
_axii, 414 pages : _billustrations ; _c24 cm. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 490 | 1 | _aElectronic materials : science and technology | |
| 596 | _a1 3 | ||
| 650 | 0 |
_aMicroelectromechanical systems. _93145 |
|
| 700 | 1 |
_aSetter, Nava. _9146786 |
|
| 907 |
_a.b10400072 _b07-11-22 _c27-11-18 |
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| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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| 999 |
_c31368 _d31368 |
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