000 01071cam a2200301 i 4500
001 u73810
003 SIRSI
005 20240619145952.0
008 110131 eng
020 _a0470093617
020 _a9780470093610
050 _aTK7875
_b.V374 2006
100 1 _aVaradan, V. K.. ,
_eauthor
_9118220
245 1 0 _aSmart material systems and MEMS :
_bdesign and development methodologies /
_cVijay K. Varadan, K. J. Vinoy and S. Gopalakrishnan.
264 1 _aHoboken, NJ :
_bJohn Wiley,
_c2006.
300 _axii, 404 pages :
_billustrations ;
_c26 cm.
336 _atext
_btxt
_2rdacontent
337 _aunmediated
_bn
_2rdamedia
338 _avolume
_bnc
_2rdacarrier
596 _a1 3
650 0 _aMicroelectromechanical systems.
_93145
650 0 _aSmart materials.
_91237
700 1 _aVinoy, K. J.
_9136870
700 1 _aGopalakrishnan, S.
_921357
907 _a.b10402147
_b07-11-22
_c27-11-18
998 _am
_b06-11-22
_cm
_da
_e-
_feng
_g
_h0
999 _c31575
_d31575