| 000 | 01022cam a2200301 i 4500 | ||
|---|---|---|---|
| 001 | u86114 | ||
| 003 | SIRSI | ||
| 005 | 20240619150027.0 | ||
| 008 | 110131 eng | ||
| 020 | _a9780470083017 | ||
| 020 | _a0470083018 | ||
| 050 |
_aTK7874 _b.H78 2008 |
||
| 100 | 1 |
_aHsu, Tai-Ran. , _eauthor _9111838 |
|
| 245 | 1 | 0 |
_aMEMS and microsystems : _bdesign, manufacture and nanoscale engineering / _cTai-Ran Hsu. |
| 250 | _a2nd ed. | ||
| 264 | 1 |
_aHoboken, NJ : _bJohn Wiley, _c2008. |
|
| 300 |
_axxv, 550 pages : _billustrations ; _c24 cm. |
||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_aunmediated _bn _2rdamedia |
||
| 338 |
_avolume _bnc _2rdacarrier |
||
| 596 | _a3 | ||
| 650 | 0 |
_aMicroelectronics. _923274 |
|
| 650 | 0 |
_aMicroelectromechanical systems. _93145 |
|
| 650 | 0 |
_aMicroelectronic packaging. _924050 |
|
| 907 |
_a.b10418623 _b07-11-22 _c28-11-18 |
||
| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
||
| 999 |
_c33223 _d33223 |
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