| 000 | 01038cam a2200301 i 4500 | ||
|---|---|---|---|
| 001 | u89288 | ||
| 003 | SIRSI | ||
| 005 | 20240619144932.0 | ||
| 008 | 110131 eng | ||
| 020 | _a0470174471 | ||
| 020 | _a9780470174470 | ||
| 050 |
_aQD506 _b.I73 2008 |
||
| 100 | 1 |
_aIrene, Eugene A. , _eauthor _9171939 |
|
| 245 | 1 | 0 |
_aSurfaces, interfaces, and thin films for microelectronics / _cEugene A. Irene. |
| 264 | 1 |
_aHoboken, NJ : _bWiley-Interscience, _c2008. |
|
| 300 |
_axiii, 515 pages : _billustrations ; _c25 cm. |
||
| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
||
| 338 |
_avolume _bnc _2rdacarrier |
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| 596 | _a1 3 | ||
| 650 | 0 |
_aSurface chemistry. _97917 |
|
| 650 | 0 |
_aInterfaces (Physical sciences). _920518 |
|
| 650 | 0 |
_aThin films. _97928 |
|
| 650 | 0 |
_aMicroelectronics _xMaterials. _923274 |
|
| 907 |
_a.b10058321 _b07-11-22 _c12-09-17 |
||
| 998 |
_am _b06-11-22 _cm _da _e- _feng _g _h0 |
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| 999 |
_c3435 _d3435 |
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