000 01125cam a2200313 i 4500
001 u132983
003 SIRSI
005 20240619150233.0
008 120413n 000 0 eng u
020 _a9780470978696
020 _a0470978694
050 1 4 _aTK7875
_b.D53 2011
245 0 0 _aDigital holography for MEMS and microsystem metrology /
_cedited by Anand Asundi.
264 1 _aHoboken :
_bJohn Wiley,
_c2011.
300 _axxii, 205 pages :
_billustrations ;
_c24 cm.
336 _atext
_btxt
_2rdacontent
337 _aunmediated
_bn
_2rdamedia
338 _avolume
_bnc
_2rdacarrier
490 1 _aWiley microsystem and nanotechnology series
596 _a1 3
650 0 _aMicroelectromechanical systems
_xMeasurement.
_93145
650 0 _aMicroelectronics
_xMeasurement.
_923274
650 0 _aHolographic testing.
_952843
650 0 _aImage processing
_xDigital techniques.
_9376
700 1 _aAsundi, Anand.
_952844
907 _a.b1047562x
_b07-11-22
_c27-12-18
998 _am
_b06-11-22
_cm
_da
_e-
_feng
_g
_h0
999 _c38920
_d38920