| 000 | 00955cam a22002897i 4500 | ||
|---|---|---|---|
| 001 | u146140 | ||
| 003 | SIRSI | ||
| 005 | 20240619150252.0 | ||
| 008 | 120627s2013 nyua b 001 0 eng d | ||
| 020 | _a9781441999849 | ||
| 020 | _a1441999841 | ||
| 050 | 0 | 0 |
_aTK7875 _b.A37 2013 |
| 245 | 0 | 0 |
_aAdvanced mechatronics and MEMS devices / _cediotr Dan Zhang. |
| 264 | 1 |
_aNew York, NY : _bSpringer, _c2013. |
|
| 300 |
_axi, 249 pages : _billustrations (some color) ; _c24 cm. |
||
| 336 |
_atext _btxt _2rdacontent |
||
| 337 |
_aunmediated _bn _2rdamedia |
||
| 338 |
_avolume _bnc _2rdacarrier |
||
| 490 | 1 |
_aMicrosystems ; _vv. 23 |
|
| 596 | _a1 3 | ||
| 650 | 0 |
_aMicroelectromechanical systems. _93145 |
|
| 650 | 0 |
_aMechatronics. _99364 |
|
| 700 | 1 |
_aZhang, Dan. _914292 |
|
| 907 |
_a.b10484048 _b07-11-22 _c31-12-18 |
||
| 998 |
_am _b06-11-22 _cm _da _e- _feng _gnyu _h0 |
||
| 999 |
_c39762 _d39762 |
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