| 000 | 00980cam a22002655i 4500 | ||
|---|---|---|---|
| 001 | u152863 | ||
| 003 | SIRSI | ||
| 005 | 20240619150300.0 | ||
| 008 | 130816s2014 pau 000 0 eng | ||
| 020 | _a9780857095008 | ||
| 020 | _a0857095005 | ||
| 050 |
_aTK7874.843 _b.N36 2014 |
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| 245 | 0 | 0 |
_aNanolithography : _bthe art of fabricating nanoelectronic and nanophotonic devices and systems / _cedited by Martin Feldman. |
| 264 | 1 |
_aOxford : _bWoodhead Publishing , _c2014. |
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| 300 |
_axxiv, 573 pages : _billustrations ; _c25 cm. |
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| 336 |
_atext _btxt _2rdacontent |
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| 337 |
_aunmediated _bn _2rdamedia |
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| 338 |
_avolume _bnc _2rdacarrier |
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| 490 | 0 |
_aWoodhead publishing series in electronic and optical materials ; _vv. 42 |
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| 596 | _a3 | ||
| 650 | 0 |
_aNanolithography. _952337 |
|
| 907 |
_a.b10487694 _b07-11-22 _c31-12-18 |
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| 998 |
_am _b06-11-22 _cm _da _e- _feng _gpau _h0 |
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| 999 |
_c40127 _d40127 |
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