000 00920cam a2200277 i 4500
001 u15978
003 SIRSI
005 20240619150306.0
008 010321 00 eng
020 _a0471246697
050 _aTA418.9 .T45
_b.62 1999
100 1 _aKodas, Toivo T. ,
_eauthor
_988773
245 1 0 _aAerosol processing of materials /
_cToivo T. Kodas, Mark J. Hampden-Smith.
264 1 _aNew York :
_bJohn Wiley,
_c1999.
336 _atext
_btxt
_2rdacontent
337 _aunmediated
_bn
_2rdamedia
338 _avolume
_bnc
_2rdacarrier
596 _a1 3
650 0 _aThin films.
_97928
650 0 _aAerosols.
_940726
650 0 _aChemical vapor deposition.
_941135
700 0 _aHampden-Smith, Mark J.
_988774
907 _a.b10490759
_b07-11-22
_c31-12-18
998 _am
_b06-11-22
_cm
_da
_e-
_feng
_g
_h0
999 _c40432
_d40432